Replicated Photonic Crystals by Atomic Layer Deposition within Holographically Defined Polymer Templates

Authors

Elton Graugnard, Boise State UniversityFollow
O. M. Roche, University of Oxford
S. N. Dunham, Georgia Institute of Technology
J. S. King, Georgia Institute of Technology
D. N. Sharp, University of Oxford
R. G. Denning, University of Oxford
A. J. Turberfield, University of Oxford
C. J. Summers, Georgia Institute of Technology

Document Type

Article

Publication Date

6-29-2009

Abstract

We report the replication of holographically defined photonic crystals using multistage atomic layer deposition. Low- and high-temperature atomic layer depositions were combined with selective etching to deposit and remove multiple conformal thin films within three-dimensional polymer templates. Using intermediate Al₂O₃ inverse replicas, temperature-sensitive SU-8 photonic crystal templates were faithfully replicated with TiO₂ and GaP, greatly increasing the dielectric contrasts of the photonic crystals. Optical measurements are in good agreement with the calculated band structures.

Publication Information

Graugnard, Elton; Roche, O. M.; Dunham, S. N.; King, J. S.; Sharp, D. N.; Denning, R. G.; Turberfield, A. J.; and Summers, C. J.. (2009). "Replicated Photonic Crystals by Atomic Layer Deposition within Holographically Defined Polymer Templates". Applied Physics Letters, 94(26), 263109-1 - 263109-3. https://doi.org/10.1063/1.3159834