Publication Date

5-2019

Date of Final Oral Examination (Defense)

12-10-2018

Type of Culminating Activity

Thesis

Degree Title

Master of Science in Mechanical Engineering

Department

Mechanical and Biomechanical Engineering

Supervisory Committee Chair

Donald Plumlee, Ph.D.

Supervisory Committee Member

Jim Browning, Ph.D.

Supervisory Committee Member

John F. Gardner, Ph.D.

Abstract

Low Temperature Cofired Ceramic (LTCC) is a material system that is ideal for integrated microelectronic packaging technology, because of its rapid prototyping and easy integration of passive components such as resistors, capacitors, and conductors. LTCC’s electrical properties makes it especially suitable for high frequency applications such as magnetrons. Recently, there has been an increased demand for greater power capacities which is resolved by phase locking multiple low power (inexpensive) magnetrons together to achieve the same power as one high power (expensive) magnetron. The Vacuum Electron Devices (VED) and Ceramic Micro Electrical Mechanical Systems (CMEMS) labs at Boise State University have designed a new field emission cathode for the L3 Technologies industrial magnetron that will precisely inject electrons into the system. This controllable electron injection, has been shown by simulation to decrease startup times, increase efficiency, and even allow for active phase control during oscillation. In this research, new LTCC manufacturing techniques were developed in order to fabricate the newly designed cathode. Two different cathode wrapping techniques were compared and the layer by group technique was faster, more easily aligned, and had a shorter learning curve. Two different via filling techniques were compared and the flat fill technique was slightly slower but, more repeatable and was less likely to cause electrical shorting. Two different facet plate manufacturing techniques were compared and the mill technique was more precise and extremely repeatable. Four different stands were compared and the square post stand had the best circularity and linearity measurements of the fired cathode. Finally, the spiral embedded stripline line was prototyped and an elementary version was assembled which matched simulations.

DOI

10.18122/td/1515/boisestate

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