LTCC Fabrication and Cold Plasma Application
Abstract
Low Temperature Co-Fired Ceramics (LTCC) are a multilayer glass ceramic substrate that are especially useful in creating microelectronic devices. By combining individual layers that have different functionalities, LTCC technology offers many useful features such as low dielectric loss, multi-functional features through high integration, and the ability to be co-fired with highly conductive metals such as silver and gold.
Using these properties our lab has been focusing on cold plasma production.
LTCC Fabrication and Cold Plasma Application
Low Temperature Co-Fired Ceramics (LTCC) are a multilayer glass ceramic substrate that are especially useful in creating microelectronic devices. By combining individual layers that have different functionalities, LTCC technology offers many useful features such as low dielectric loss, multi-functional features through high integration, and the ability to be co-fired with highly conductive metals such as silver and gold.
Using these properties our lab has been focusing on cold plasma production.