Towards Integration of FTIR Spectrometer to ALD System for in situ Characterization of ALD Processes

Additional Funding Sources

The Bridges to Baccalaureate program is supported by the National Institute of General Medical Sciences of the National Institutes of Health under Award No. R25GM123927. The project described received further support from the American Chemical Society Project SEED Program.

Abstract

This project is the integration of a Nicolet Magna 550 FTIR Machine into the FTIR Systems at BSU in order to observe ALD processes in real time. This will prove useful in the growth of ALD films. At the time of writing, this project is still in progress.

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Towards Integration of FTIR Spectrometer to ALD System for in situ Characterization of ALD Processes

This project is the integration of a Nicolet Magna 550 FTIR Machine into the FTIR Systems at BSU in order to observe ALD processes in real time. This will prove useful in the growth of ALD films. At the time of writing, this project is still in progress.