Anodized aluminum is commonly used to create wear-resistant parts for process tools used in the semiconductor industry. Sinc microchips require high purity manufacturing environments, surface impurities on tooling needs to be minimized.
It has been determined that anodized aluminum parts are one source of contamination. This project investigates the source of trace elements in anodized aluminum 6061 parts and ways to reduce them.
Chad Watson, Dr. Mike Hurley, Dr. John Youngsman