ScholarWorks

Title

Minimization of Surface Impurities in Anodized Aluminum

Authors

Logan Ward, Department of Materials Science and Engineering, Boise State UniversityFollow
Steven Livers, Department of Materials Science and Engineering, Boise State UniversityFollow
Amber Huddleston, Department of Materials Science and Engineering, Boise State UniversityFollow

Document Type

Student Presentation

Publication Date

4-11-2011

Abstract

Anodized aluminum is commonly used to create wear-resistant parts for process tools used in the semiconductor industry. Sinc microchips require high purity manufacturing environments[1], surface impurities on tooling needs to be minimized.

It has been determined that anodized aluminum parts are one source of contamination. This project investigates the source of trace elements in anodized aluminum 6061 parts and ways to reduce them.

Faculty Sponsor

Chad Watson, Dr. Mike Hurley, Dr. John Youngsman