2026 Undergraduate Research Showcase

Optimized CVD Prototype for Advanced Fluid and Heat Transfer Solutions

Document Type

Student Presentation

Presentation Date

4-24-2026

Faculty Sponsor

Dr. Todd Otanicar

Abstract

Showerhead plates are critical components in chemical vapor deposition (CVD) systems, where uniform gas distribution is required for consistent processing. However, non-uniform pressure distributions across the plate can introduce structural loading that leads to deformation and reduced performance. This study presents the design, fabrication, and evaluation of a 3-inch showerhead prototype to investigate pressure-induced warping. A parametric design approach was used to vary perforation diameter and spacing, and computational fluid dynamics (CFD) simulations in COMSOL were performed to predict resulting pressure distributions. Based on these results, a physical prototype was manufactured using additive manufacturing techniques and instrumented with a custom-designed printed circuit board (PCB) integrating high-resolution pressure sensors. Experimental measurements of radial pressure gradients were collected under constant mass flow conditions and correlated with analytical and numerical structural models to predict out-of-plane deformation. Results demonstrate that perforation geometry significantly influences pressure non-uniformity and corresponding structural loading. This work establishes a validated framework linking design, fabrication, and experimental data to structural response, providing insight for optimizing showerhead plates for improved flow uniformity and mechanical stability.

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