The Design and Testing of Fluidic Oscillators made in LTCC
The interest in using fluidic devices as replacements for electronic logic circuit devices has seen renewed interest as NASA looks for ways to operate in harsh interplanetary environments. The size, multi-layer capabilities and ability to incorporate fluidic channels in a ceramic substrate make Low Temperature Co-Fired Ceramics (LTCC) a viable platform for development of these fluidic devices. Fluidic oscillators and fluidic diodes are being developed at BSU in LTCC. Fluidic oscillators can be used for measuring flow rates, fluid viscosity as well as a replacement for electronic oscillators. Fluidic diodes can be used as check-valves or as replacements for electronic diodes. In this work, we will describe the development and testing of a fluidic oscillator in LTCC. To produce a fluidic oscillator the standard C-MEMS fabrication process is used. A CNC milling machine was used to create the internal geometry. This allows the maximum flexibility in channel geometry. The top layer of each device will be fabricated using a clear material (lexan, sapphire or glass) to allow visual observation of the fluidic flows in each device. Additional testing will be performed by measuring pressure at the inlet and both outlets. Several different design geometries will be produced and observed to determine how performance varies with geometry. Two options are considered in the moment. In this report, a variety of designs will be presented and tested. Device performance will be determined by observing oscillation speed, at equal input pressure.
Müllner, David P. and Plumlee, Donald G.. (2011). "The Design and Testing of Fluidic Oscillators made in LTCC". 7th IMAPS/AcerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, 210-212.