Replicated Photonic Crystals by Atomic Layer Deposition within Holographically Defined Polymer Templates
We report the replication of holographically defined photonic crystals using multistage atomic layer deposition. Low- and high-temperature atomic layer depositions were combined with selective etching to deposit and remove multiple conformal thin films within three-dimensional polymer templates. Using intermediate Al2O3 inverse replicas, temperature-sensitive SU-8 photonic crystal templates were faithfully replicated with TiO2 and GaP, greatly increasing the dielectric contrasts of the photonic crystals. Optical measurements are in good agreement with the calculated band structures.
Graugnard, Elton; Roche, O. M.; Dunham, S. N.; King, J. S.; Sharp, D. N.; Denning, R. G.; Turberfield, A. J.; and Summers, C. J.. (2009). "Replicated Photonic Crystals by Atomic Layer Deposition within Holographically Defined Polymer Templates". Applied Physics Letters, 94(26), 263109-1 - 263109-3. http://dx.doi.org/10.1063/1.3159834