A monolithic integrated chip-scale surface plasmon resonance (SPR) sensor is demonstrated. The device consists of a pn photodiode covered with a periodic modified thin metal film whose lattice constant is on the order of the wavelength of light. The device performs real-time measurement of resonant wavelengths of enhanced optical transmission due to surface plasmon resonance, which are influenced by the presence of chemical or biological materials at the device’s surface.
Bollschweiler, Lincoln; English, Alex; Baker, R. Jacob; Kuang, Wan; Chang, Zi-Chang; Shih, Ming-Hsiung; and Knowlton, William. (2009). "Chip-Scale Nanophotonic Chemical and Biological Sensors Using CMOS Process". 52nd IEEE International Midwest Symposium on Circuits and Systems, 2009. MWSCAS '09., 913-916. http://dx.doi.org/10.1109/MWSCAS.2009.5235915